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Info for "Self-aligning planarization and passivation for integration applications in III-V semiconductor devices
"Author: H. V. Demir, J. F. Zheng, V. A. Sabnis, O. Fidaner, J. Hanberg, J. S. Harris and D. A. B. Miller
Reference Type: Journal Article
Link: Click Here
Year Published: 2005
Journal: IEEE Transactions on Semiconductor Manufacturing
, Volume 18
, Issue 1
(Notes: M3: Article; M3: Journal article; Copyright 2008 Elsevier Engineering Information, Inc.; IEE; The Thomson Corporation
)
Pages: 182-9
Author Address: Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA; Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA; Stanford Univ, Solid State & Photon Lab, Stanford, CA 94305 USA; Bilkent Univ, Nanotechnol Res Ctr, TR-06800 Bilkent, Turkey; Intel C
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