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Info for "Protecting wafer surface during plasma ignition using an arsenic cap
"Author: M. A. Wistey, S. R. Bank, H. B. Yuen, L. L. Goddard, T. Gugov and J. S. Harris
Reference Type: Journal Article
Link: Click Here
Year Published: 2005
Journal: 22nd North American Conference on Molecular Beam Epitaxy, 10-14 Oct. 2004, Banff, Alta.,Canada
, Volume 23
, Issue 3
(Notes: M3: Article; M3: Conference Publication; M3: Journal article; Copyright 2008 Elsevier Engineering Information, Inc.; IEE; The Thomson Corporation
)
Pages: 1324-7
Author Address: Stanford Univ, Solid State & Photon Lab, Stanford, CA 94305 USA; Stanford Univ, Solid State & Photon Lab, Stanford, CA 94305 USA
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