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Info for "Using beam flux monitor as Langmuir probe for plasma-assisted molecular beam epitaxy
"Author: M. A. Wistey, S. R. Bank, H. B. Yuen, J. S. Harris, M. M. Oye and A. L. Holmes
Reference Type: Journal Article
Link: Click Here
Year Published: 2005
Journal: Journal of Vacuum Science & Technology A (Vacuum, Surfaces, and Films)
, Volume 23
, Issue 3
(Notes: M3: Article; M3: Journal article; Copyright 2008 Elsevier Engineering Information, Inc.; IEE; The Thomson Corporation
)
Pages: 460-4
Author Address: Stanford Univ, Solid State & Photon Lab, Stanford, CA 94305 USA; Stanford Univ, Solid State & Photon Lab, Stanford, CA 94305 USA; Univ Texas, Microelect Res Ctr, Austin, TX 78712 USA
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