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Info for "Self-aligned via and trench for metal contact in III-V semiconductor devices
"Author: J. F. Zheng, H. V. Demir, V. A. Sabnis, O. Fidaner, J. S. Harris and D. A. B. Miller
Reference Type: Journal Article
Link: Click Here
Year Published: 2006
Journal: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
, Volume 24
, Issue 3
(Notes: M3: Article; M3: Journal article; Copyright 2008 Elsevier Engineering Information, Inc.; The Thomson Corporation
)
Pages: 1117-1122
Author Address: Intel Corp, Santa Clara, CA 95052 USA; Intel Corp, Santa Clara, CA 95052 USA; Bilkent Univ, Dept Phys, Nanotechnol Res Ctr, TR-06800 Ankara, Turkey; Bilkent Univ, Dept Elect & Elect Engn, TR-06800 Ankara, Turkey; Stanford Univ, Edward L Ginzton Lab, Stanf
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