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Info for "Atomic layer deposition of Al2O3 on Germanium-tin (GeSn) and impact of wet chemical surface pre-treatment"

Author: Suyog Gupta, Robert Chen, James S. Harris, Krishna C. Saraswat
Reference Type: Journal Article
Link: Click Here
Year Published: 2013

Journal: Appl. Phys. Lett., Volume 103
Pages: 241601

     
 

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