Publications

Search in: Author Title Conference Journal Keywords All

Go Back to Previous Page

Info for "In-situ Film Thickness and Temperature Measurements in MBE by Transmission Spectroscopy"

Author: J. S. Harris
Reference Type: Presentation
Year Published: 1993

Event/Location Name: In-Situ Film Thickness and Temperature Measurement Systems for Semiconductor Manufacturing
Location/City: Erlangen, Germany
Date: June, 1993
Invited: Yes

     
 

Paul G. Allen Center for Integrated Systems, CISX-328, 420 Via Palou, Stanford University, Stanford, CA 94305-4075
Office phone: (650)723-0983 / Fax: (650)723-4659
Website Developed by: Stanford Internet Solutions ©2008