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Info for "Localized Intermixing of AlAs and GaAs Layers for Lithographic Control of the Lateral Oxidation of AlAs"

Author: R. Massengale, C. Y. Tai, M. D. Deal, J. D. Plummer, and J. S. Harris
Reference Type: Presentation
Year Published: 1997

Event/Location Name: International Symposium on Compound Semiconductors
Location/City: San Diego, California
Date: September 8 - 11, 1997
Invited: No

     
 

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