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Info for "Arsenic Incorporation in Si and SiGe Molecular Beam Epitaxy"

Author: X. Liu, Q. Tang, T.I. Kamins J.S. Harris
Reference Type: Presentation
Year Published: 2002

Event/Location Name: 2002 MRS Spring Symposium
Location/City: San Francisco, CA
Date: April 2002.
Invited: No

     
 

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