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Info for "Heavy Arsenic Doping of Silicon by Molecular Beam Epitaxy: Incorporation and Transport Properties" Author: X. Liu, Q. Tang, T.I. Kamins, J.S. Harris Reference Type: Presentation Year Published: 2002 Event/Location Name: MRS Fall Symposium Location/City: Boston, MA Date: December 2002. Invited: No

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Info for "Heavy Arsenic Doping of Silicon by Molecular Beam Epitaxy: Incorporation and Transport Properties"