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Info for "Low-Voltage Deflection Plates Reduce Plasma Damage in MBE Dilute Nitride Growth"Author: M. A. Wistey, S. R. Bank, H. B. Yuen, V. F. Gambin, and J. S. Harris
Reference Type: Presentation
Year Published: 2004
Event/Location Name: 46th Electronic Materials Conference (EMC)
Location/City: Notre Dame/IN
Date: Jun. 2004
Invited: No
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