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Info for "Sub-100nm Fabrication Technology and Devices by Combining Electron Beam Lithography and Molecular Beam Epitaxy" Author: S. Y. Chou, J. S. Harris, Jr., R. F. W. Pease, D. Allee, P. de la Houssaye, M. McCord, D. Narum and D. Schlom Reference Type: Presentation Year Published: 1987 Event/Location Name: American Physical Society Meeting Location/City: New York, NY Date: March, 1987 Invited: Yes

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Info for "Sub-100nm Fabrication Technology and Devices by Combining Electron Beam Lithography and Molecular Beam Epitaxy"