Publications

Author: M. C. Larson, B. Pezeshki and J. S. Harris
Reference Type: Journal Article
Link: Click Here
Year Published: 1995

Journal: IEEE Photonics Technology Letters , Volume 7 , Issue 4 (Notes: M3: Article; M3: Journal article; Copyright 2008 Elsevier Engineering Information, Inc.; IEE; The Thomson Corporation )
Pages: 382-4
Abstract: Fabry-Perot microinterferometer is demonstrated that combines a GaAs-AlAs vertical cavity with a suspended movable membrane. Electrostatic displacement of the gold/silicon nitride membrane allows for broad and continuous wavelength tuning of the cavity resonance formed by the combination of the GaAs cavity and the air gap below the membrane. The device exhibits a 32-nm tuning range around the 920-nm center wavelength for 0-14 V applied bias and FWHM linewidths near 3 nm; this corresponds to membrane deflections of up to 0.27 μm. Such structures provide the foundation for wavelength selective photodiodes, light emitters, and lasers in which the active wavelength is under voltage control
Author Address: STANFORD UNIV, DEPT ELECT ENGN, SOLID STATE LAB, STANFORD, CA 94305; IBM CORP, THOMAS J WATSON RES CTR, DIV RES, YORKTOWN HTS, NY 10598