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Info for "REACTIVE ION ETCHING OF GAN USING CHF3/AR AND C2CLF5/AR PLASMAS "

Author: H. Lee, D. B. Oberman and J. S. Harris
Reference Type: Journal Article
Link: Click Here
Year Published: 1995

Journal: Applied Physics Letters , Volume 67 , Issue 12 (Notes: M3: Article; Copyright 2008 The Thomson Corporation )
Pages: 1754-1756
Author Address: STANFORD UNIV, SOLID STATE ELECTR LAB, STANFORD, CA 94305

     
 

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