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Info for "Reactive ion etching of gallium nitride films "

Author: H. Lee, D. B. Oberman and J. S. Harris
Reference Type: Journal Article
Link: Click Here
Year Published: 1996

Journal: 37th Electronic Materials Conference. III-V Nitrides and Silicon Carbide, 1995, Charlottesville, VA, USA , Volume 25 , Issue 5 (Notes: M3: Article; M3: Conference Publication; Copyright 2008 IEE; The Thomson Corporation )
Pages: 835-7
Author Address: STANFORD UNIV, SOLID STATE ELECTR LAB, STANFORD, CA 94305

     
 

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