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Info for "Localised impurity induced layer disordering for lithographic control of the lateral oxidation of AlAs
"Author: A. R. Massengale, T. Ueda, J. S. Harris, C. Y. Tai, M. D. Deal, J. D. Plummer and R. Fernandez
Reference Type: Journal Article
Link: Click Here
Year Published: 1997
Journal: Electronics Letters
, Volume 33
, Issue 12
(Notes: M3: Article; M3: Journal article; Copyright 2008 Elsevier Engineering Information, Inc.; IEE; The Thomson Corporation
)
Pages: 1087-9
Author Address: Stanford Univ, Ctr Integrated Syst, Solid State Elect Lab, Stanford, CA 94305 USA; Stanford Univ, Ctr Integrated Syst, Solid State Elect Lab, Stanford, CA 94305 USA; Stanford Univ, Ctr Integrated Syst, Integrated Circuits Lab, Stanford, CA 94305 USA; Lock
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