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Info for "Localized intermixing of AlAs and GaAs layers for lithographic control of the lateral oxidation of AlAs "

Author: A. R. Massengale, C. Y. Tai, M. D. Deal, J. D. Plummer and J. S. Harris
Reference Type: Journal Article
Link: Click Here
Year Published: 1998

Journal: Compound Semiconductors 1997 , Volume 156 (Notes: M3: Article; Copyright 2008 The Thomson Corporation )
Pages: 329-332
Author Address: Stanford Univ, Solid State Elect Lab, CIS-X 329, Stanford, CA 94305 USA; Stanford Univ, Solid State Elect Lab, Stanford, CA 94305 USA; Stanford Univ, Integrated Circuits Lab, Stanford, CA 94305 USA

     
 

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