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Info for "Sub-100nm Fabrication Technology and Devices by Combining Electron Beam Lithography and Molecular Beam Epitaxy"
Author: S. Y. Chou, J. S. Harris, Jr., R. F. W. Pease, D. Allee, P. de la Houssaye, M. McCord, D. Narum and D. Schlom
Reference Type: Presentation
Year Published: 1987
Event/Location Name: American Physical Society Meeting
Location/City: New York, NY
Date: March, 1987