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Info for "Sub-100nm Gate Length GaAs MESFETs and MODFETs Fabricated by a Combination of MBE and Electron Beam Lithography"

Author: D. R. Allee, P. R. de la Houssaye, D. G. Schlom, J. S. Harris, Jr., and R. F. W. Pease
Reference Type: Presentation
Year Published: 1987

Event/Location Name: International Symposium on Electron, Ion and Photon Beams
Location/City: Woodland Hills, CA
Date: May, 1987
Invited: No


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